HELIOS | High Throughput Object Coating

COMMERCIAL SCALE HIGH THROUGHPUT OBJECT COATING SYSTEMS 

The HELIOS industrial line offers cost-effective ALD coatings on parts ranging from microns to meters. HELIOS coating systems bring film quality, atomic-level control and conformal performance of ALD to industrial manufacturing, opening up new possibilities and enabling novel applications as protective of functional surface engineered objects.

PERFORMANCE

 HELIOS is designed for efficiency with ‘zero-waste’ processing, substantially lower factory power consumption and small footprint. A patented integrated abatement ensures minimal maintenance and exceeds up times records of legacy CVD and PVD equipment.

CAPABILITIES

  • Thick film deposition ( up to 12 micron)
  • Fast ALD deposition at low temperatures
  • Low temperature processing (down to 70 °C)
  • 100% conformal films over any substrate topology
  • Seamless incorporation of nano-laminates with reproducible atomic-layer control
  • Composite ternary and quaternary alloy films with no throughput penalty

SPECIFICATIONS

  • ETL Certified
  • Flexible and scalable system configuration
  • Fully interlocked for safety and zero-emission
  • Small footprint
  • Low cost of ownership
  • Deposition chamber size up to 1m x 1m
  • High throughput growth 60-150 Å/min
  • Maintenance at 500 μm intervals
  • Zero-waste abatement system
  • Up to 90% efficiency of consumables

Commercial Scale Atomic Layer Deposition on Objects

Chemistries: Cost-effective ALD of films including ZrO2, Al2O3, ZnO, ZnAlO, ZnBO, SiO2, TiO2, TiAlO, TiN, BN, Nb3N5 and more. Seamless and reproducible film engineering with nanolaminate and nanocomposite capabilities, adhesion in excess of 1000 PSI to many different substrates including tin, gold, copper, FR4, polyimides, many different solder mask materials, polyurethanes, ceramics, adhesives and more.

ApplicAtions: • Electronic devices • Sensors, OLED displays

• PCBs, CoBs, ICs and modules

• Medical devices and sensors 

• Optical coatings

• Display and Solar technology

• Photo-catalytic coatings

• Encapsulation for environmental, corrosion, and high voltage insulation

Design: HELIOS accommodates  parts with many different shapes and sizes with the combination of modular, parts-specific tooling and a generic loader. Standard chamber size from 1.5-80 liters or up to 1m X 1m panels (custom sizes available).

Download our brochure for more information, or CONTACT us to speak to a surface engineering expert.

SPECIFICATIONS

Temperature Window: 50 – 200 °C

Liquid Chemical Inlets: Up to 4

Gaseous Chemical Inlets: Up to 4

 

Footprint: 30′ L x 16′ W x 14′ H

Capacity: Up to 300 Liters of powdered substrate

Substrate Handling: Automated Inert Loading

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